| Segment / region | Type | Fiscal year | Currency | Revenue (millions) | Share of revenue |
|---|---|---|---|---|---|
| CHINA | Region | 2025 | EUR | 9,519.7 | 29.6% |
| TAIWAN | Region | 2025 | EUR | 8,337.9 | 25.9% |
| KOREA, REPUBLIC OF | Region | 2025 | EUR | 8,159.6 | 25.4% |
| UNITED STATES | Region | 2025 | EUR | 4,089.1 | 12.7% |
| JAPAN | Region | 2025 | EUR | 1,420.9 | 4.4% |
| SINGAPORE | Region | 2025 | EUR | 608.4 | 1.9% |
| NETHERLANDS | Region | 2025 | EUR | 4.7 | 0.0% |
| Rest Of Asia | Region | 2025 | EUR | 2.7 | 0.0% |
| CHINA | Region | 2024 | USD | 10,195.1 | 37.8% |
| KOREA, REPUBLIC OF | Region | 2024 | USD | 6,408.8 | 23.8% |
| UNITED STATES | Region | 2024 | USD | 4,521.8 | 16.8% |
| TAIWAN | Region | 2024 | USD | 4,354.0 | 16.2% |
| JAPAN | Region | 2024 | USD | 1,156.0 | 4.3% |
| SINGAPORE | Region | 2024 | USD | 285.0 | 1.1% |
| NETHERLANDS | Region | 2024 | USD | 16.6 | 0.1% |
| Rest Of Asia | Region | 2024 | USD | 3.5 | 0.0% |
| TAIWAN | Region | 2023 | USD | 8,074.6 | 30.6% |
| CHINA | Region | 2023 | USD | 7,251.8 | 27.5% |
| KOREA, REPUBLIC OF | Region | 2023 | USD | 6,949.2 | 26.4% |
| UNITED STATES | Region | 2023 | USD | 3,151.4 | 12.0% |
| JAPAN | Region | 2023 | USD | 613.6 | 2.3% |
| SINGAPORE | Region | 2023 | USD | 282.1 | 1.1% |
| NETHERLANDS | Region | 2023 | USD | 25.1 | 0.1% |
| Rest Of Asia | Region | 2023 | USD | 3.9 | 0.0% |
| TAIWAN | Region | 2022 | USD | 8,095.5 | 38.2% |
| KOREA, REPUBLIC OF | Region | 2022 | USD | 6,045.6 | 28.6% |
| CHINA | Region | 2022 | USD | 2,916.0 | 13.8% |
| UNITED STATES | Region | 2022 | USD | 1,991.3 | 9.4% |
| JAPAN | Region | 2022 | USD | 1,008.6 | 4.8% |
| Rest of Europe and Middle East | Region | 2022 | USD | 624.5 | 3.0% |
| SINGAPORE | Region | 2022 | USD | 475.5 | 2.3% |
| NETHERLANDS | Region | 2022 | USD | 9.2 | 0.0% |
| Rest of Asia | Region | 2022 | USD | 7.2 | 0.0% |
| TAIWAN, PROVINCE OF CHINA | Region | 2021 | USD | 7,327.9 | 39.4% |
| KOREA, REPUBLIC OF | Region | 2021 | USD | 6,223.0 | 33.4% |
| CHINA | Region | 2021 | USD | 2,740.8 | 14.7% |
| UNITED STATES | Region | 2021 | USD | 1,583.2 | 8.5% |
| JAPAN | Region | 2021 | USD | 459.3 | 2.5% |
| Rest of Europe and Middle East | Region | 2021 | USD | 134.6 | 0.7% |
| SINGAPORE | Region | 2021 | USD | 126.2 | 0.7% |
| NETHERLANDS | Region | 2021 | USD | 14.2 | 0.1% |
| Rest of Asia | Region | 2021 | USD | 1.8 | 0.0% |
| TAIWAN, PROVINCE OF CHINA | Region | 2020 | USD | 4,731.3 | 33.9% |
| KOREA, REPUBLIC OF | Region | 2020 | USD | 4,151.6 | 29.7% |
| CHINA | Region | 2020 | USD | 2,324.4 | 16.6% |
| UNITED STATES | Region | 2020 | USD | 1,657.0 | 11.9% |
| JAPAN | Region | 2020 | USD | 542.8 | 3.9% |
| Rest of Europe and Middle East | Region | 2020 | USD | 483.3 | 3.5% |
| SINGAPORE | Region | 2020 | USD | 84.9 | 0.6% |
| NETHERLANDS | Region | 2020 | USD | 1.6 | 0.0% |
| Rest of Asia | Region | 2020 | USD | 1.6 | 0.0% |
| NXE | Product | 2025 | EUR | 10,445.8 | 42.7% |
| Arf immersion | Product | 2025 | EUR | 10,311.4 | 42.1% |
| EXE | Product | 2025 | EUR | 1,156.9 | 4.7% |
| Krf | Product | 2025 | EUR | 1,001.3 | 4.1% |
| Metrology and inspection | Product | 2025 | EUR | 824.6 | 3.4% |
| Arf Dry | Product | 2025 | EUR | 427.0 | 1.7% |
| I-Line | Product | 2025 | EUR | 307.3 | 1.3% |
| Arf immersion | Product | 2024 | USD | 9,667.0 | 34.2% |
| NXE | Product | 2024 | USD | 7,856.4 | 27.8% |
| Service And Field Options | Product | 2024 | USD | 6,494.2 | 23.0% |
| Krf | Product | 2024 | USD | 1,991.2 | 7.1% |
| Arf Dry | Product | 2024 | USD | 774.4 | 2.7% |
| Metrology and inspection | Product | 2024 | USD | 645.5 | 2.3% |
| EXE | Product | 2024 | USD | 465.0 | 1.7% |
| I-Line | Product | 2024 | USD | 369.2 | 1.3% |
| NXE | Product | 2023 | USD | 9,124.0 | 33.1% |
| Arfi | Product | 2023 | USD | 9,017.4 | 32.7% |
| Service And Field Options | Product | 2023 | USD | 5,619.9 | 20.4% |
| Krf | Product | 2023 | USD | 2,202.5 | 8.0% |
| Arf Dry | Product | 2023 | USD | 780.2 | 2.8% |
| Metrology and inspection | Product | 2023 | USD | 536.1 | 2.0% |
| I-Line | Product | 2023 | USD | 278.4 | 1.0% |
| Euv | Product | 2022 | USD | 7,045.3 | 33.3% |
| Service And Field Options | Product | 2022 | USD | 5,743.1 | 27.1% |
| Arfi | Product | 2022 | USD | 5,236.5 | 24.7% |
| Krf | Product | 2022 | USD | 1,653.7 | 7.8% |
| Metrology and inspection | Product | 2022 | USD | 659.6 | 3.1% |
| Arf Dry | Product | 2022 | USD | 623.7 | 3.0% |
| I-Line | Product | 2022 | USD | 211.5 | 1.0% |
| Euv | Product | 2021 | USD | 6,284.0 | 33.8% |
| Arfi | Product | 2021 | USD | 4,959.6 | 26.7% |
| Service And Field Options | Product | 2021 | USD | 4,958.2 | 26.6% |
| Krf | Product | 2021 | USD | 1,321.3 | 7.1% |
| Metrology and inspection | Product | 2021 | USD | 513.7 | 2.8% |
| Arf Dry | Product | 2021 | USD | 431.9 | 2.3% |
| I-Line | Product | 2021 | USD | 142.3 | 0.8% |
| Euv | Product | 2020 | USD | 4,463.8 | 31.9% |
| Arfi | Product | 2020 | USD | 3,917.0 | 28.0% |
| Service And Field Options | Product | 2020 | USD | 3,661.9 | 26.2% |
| Krf | Product | 2020 | USD | 1,012.3 | 7.2% |
| Arf Dry | Product | 2020 | USD | 427.0 | 3.1% |
| Metrology and inspection | Product | 2020 | USD | 350.1 | 2.5% |
| I-Line | Product | 2020 | USD | 146.4 | 1.1% |
Product and geographic breakdowns describe the same revenue from different perspectives and should not be added together.
